Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

Instrument Location Person in Charge
RIE, Oxford PlasmaPro100 ICN Dr. Dario Grochla (WdM)
RIBE, Oxford Ionfab300Plus ICN Dr. Dario Grochla (WdM)
ASE, Oxford PlasmaPro Estrelas 100 ICN Dr. Dario Grochla (WdM)
PECVD, Oxford PlasmaPro100 ICN Dr. Dario Grochla (WdM)