Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

Instrument Location Person in Charge
RIE, Oxford PlasmaPro100 ICN Wiebke Plath
RIBE, Oxford Ionfab300Plus ICN Wiebke Plath
ASE, Oxford PlasmaPro Estrelas 100 ICN Wiebke Plath
PECVD, Oxford PlasmaPro100 ICN Wiebke Plath