Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

(Photo @ Markus Steur / THIEMT)

 

Instrument Location Person in Charge
RIE, Oxford PlasmaPro100 ZGH Cleanroom

Dry Etching Lab 03-208

Dr. Dennis Naujoks
RIBE, Oxford Ionfab300Plus ZGH Cleanroom

Dry Etching Lab 03-208

Dr. Dennis Naujoks
ASE, Oxford PlasmaPro Estrelas 100 ZGH Cleanroom

Dry Etching Lab 03-208

Dr. Dennis Naujoks
PECVD, Oxford PlasmaPro100 ZGH Cleanroom

Dry Etching Lab 03-208

Dr. Dennis Naujoks