Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

Instrument Location Person in Charge
RIE, Oxford PlasmaPro100 ZGH 03 Dr. Dennis Naujoks
RIBE, Oxford Ionfab300Plus ZGH 03 Dr. Dennis Naujoks
ASE, Oxford PlasmaPro Estrelas 100 ZGH 03 Dr. Dennis Naujoks
PECVD, Oxford PlasmaPro100 ZGH 03 Dr. Dennis Naujoks