Instrument | Location | Person in Charge |
RIE, Oxford PlasmaPro100 | ZGH 03 | Dr. Dennis Naujoks |
RIBE, Oxford Ionfab300Plus | ZGH 03 | Dr. Dennis Naujoks |
ASE, Oxford PlasmaPro Estrelas 100 | ZGH 03 | Dr. Dennis Naujoks |
PECVD, Oxford PlasmaPro100 | ZGH 03 | Dr. Dennis Naujoks |