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RUB » ZGH > Core Facilities > Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

Core facility III: Cleanroom for the Fabrication of Micro and Nanostructured Surfaces and MEMS Tools

Instrument	Location	Person in Charge
RIE, Oxford PlasmaPro100	ZGH 03	Dr. Dennis Naujoks
RIBE, Oxford Ionfab300Plus	ZGH 03	Dr. Dennis Naujoks
ASE, Oxford PlasmaPro Estrelas 100	ZGH 03	Dr. Dennis Naujoks
PECVD, Oxford PlasmaPro100	ZGH 03	Dr. Dennis Naujoks