Cameca LEAP 5000 XR
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Specifications:
- Detection efficiency ~50%
- Pulsed voltage
- Pulsed laser: UV laser (λ= 355 nm, ~10 ps) with up to 500 kHz repetition rates
Key features:
- 3D analysis in real space
- Equal detection sensitivity for all elements
- Spatial resolution: Δx~0.2 nm, Δz~0.1 nm
- Mass resolution: Δm/m=1/1000, FWHM at 27 Da
- Probed volume: ~200 nm x 200 nm x 1000 nm
- Detection sensitivity: min. 1 appm
- Data acquisition rate: max. ~5 Mio/min
Applications:
- Partitioning or segregation at internal interfaces / defects (grain boundaries, phase boundaries, dislocations,..)
- Atomic or nano-scale second phase formation (nucleation & growth, spinodal decomposition,..)
- Atomic or nano-scale diffusion processes (interdiffusion, grain boundary diffusion,..)
- Chemical analysis of dopants