Atom Probe

Cameca LEAP 5000 XR

 

 

Specifications:

  • Detection efficiency ~50%
  • Pulsed voltage
  • Pulsed laser: UV laser (λ= 355 nm, ~10 ps) with up to 500 kHz repetition rates

Key features:

  • 3D analysis in real space
  • Equal detection sensitivity for all elements
  • Spatial resolution: Δx~0.2 nm, Δz~0.1 nm
  • Mass resolution: Δm/m=1/1000, FWHM at 27 Da
  • Probed volume: ~200 nm x 200 nm x 1000 nm
  • Detection sensitivity: min. 1 appm
  • Data acquisition rate: max. ~5 Mio/min

Applications:

  • Partitioning or segregation at internal interfaces / defects (grain boundaries, phase boundaries, dislocations,..)
  • Atomic or nano-scale second phase formation (nucleation & growth, spinodal decomposition,..)
  • Atomic or nano-scale diffusion processes (interdiffusion, grain boundary diffusion,..)
  • Chemical analysis of dopants